JPH0159721B2 - - Google Patents
Info
- Publication number
- JPH0159721B2 JPH0159721B2 JP55151300A JP15130080A JPH0159721B2 JP H0159721 B2 JPH0159721 B2 JP H0159721B2 JP 55151300 A JP55151300 A JP 55151300A JP 15130080 A JP15130080 A JP 15130080A JP H0159721 B2 JPH0159721 B2 JP H0159721B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature sensor
- semiconductor chip
- metal electrode
- metal
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 39
- 239000004065 semiconductor Substances 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
- G01K7/223—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor characterised by the shape of the resistive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/01—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Thermistors And Varistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2944015A DE2944015C2 (de) | 1979-10-31 | 1979-10-31 | Temperatursensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5679485A JPS5679485A (en) | 1981-06-30 |
| JPH0159721B2 true JPH0159721B2 (en]) | 1989-12-19 |
Family
ID=6084847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15130080A Granted JPS5679485A (en) | 1979-10-31 | 1980-10-28 | Temperature sensor |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0028387B1 (en]) |
| JP (1) | JPS5679485A (en]) |
| DE (1) | DE2944015C2 (en]) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3276965D1 (en) * | 1981-03-16 | 1987-09-17 | Schaumburg Hanno | Sensor device for the measurement of physical quantities, as well as a process for its manufacture, and its application |
| DE3139556A1 (de) * | 1981-10-05 | 1983-04-21 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Schaltungsanordnung zur messung von temperaturen |
| DE3146909A1 (de) * | 1981-11-26 | 1983-06-01 | Philips Patentverwaltung Gmbh, 2000 Hamburg | "temperatursensor" |
| DE3212026A1 (de) * | 1982-03-31 | 1983-10-06 | Siemens Ag | Temperatursensor |
| DE3245178C2 (de) * | 1982-12-07 | 1986-12-11 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Symmetrischer Temperatursensor |
| EP0264564B1 (de) * | 1986-09-30 | 1992-11-11 | Siemens Aktiengesellschaft | Silizium-Temperatursensor |
| DE10136005C1 (de) * | 2001-06-06 | 2002-11-28 | Infineon Technologies Ag | Halbleiter-Temperatursensor vom Ausbreitungswiderstands-Typ |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3440883A (en) * | 1966-12-01 | 1969-04-29 | Monsanto Co | Electronic semiconductor thermometer |
| US3566690A (en) * | 1969-08-20 | 1971-03-02 | Northern Electric Co | Thermal delay semiconductor thermometer |
| FR2123179B1 (en]) * | 1971-01-28 | 1974-02-15 | Commissariat Energie Atomique |
-
1979
- 1979-10-31 DE DE2944015A patent/DE2944015C2/de not_active Expired
-
1980
- 1980-10-28 JP JP15130080A patent/JPS5679485A/ja active Granted
- 1980-10-28 EP EP80106607A patent/EP0028387B1/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2944015A1 (de) | 1981-05-14 |
| JPS5679485A (en) | 1981-06-30 |
| EP0028387A1 (de) | 1981-05-13 |
| EP0028387B1 (de) | 1984-03-28 |
| DE2944015C2 (de) | 1985-01-10 |
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